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Oxides deposition

Oxide deposition system for 2- to 18-inch wafers, offering outstanding deposition uniformity
Machine de dépôt d'oxydes : Sybilla 200
Machine de dépôt d'oxydes : Sybilla 450
Machine de dépôt d'oxydes : Sybilla 150

Gamme de machines Sybilla

CBVD technology developed in partnership with our partner 3D Oxides
Excellent deposition uniformity on wafers up to Ø450 mm
Real-time monitoring to maintain optimal growth conditions
Fully automated process